JPH0270718U - - Google Patents

Info

Publication number
JPH0270718U
JPH0270718U JP15137588U JP15137588U JPH0270718U JP H0270718 U JPH0270718 U JP H0270718U JP 15137588 U JP15137588 U JP 15137588U JP 15137588 U JP15137588 U JP 15137588U JP H0270718 U JPH0270718 U JP H0270718U
Authority
JP
Japan
Prior art keywords
housing
pressure area
high pressure
hollow fiber
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15137588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0641629Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988151375U priority Critical patent/JPH0641629Y2/ja
Publication of JPH0270718U publication Critical patent/JPH0270718U/ja
Application granted granted Critical
Publication of JPH0641629Y2 publication Critical patent/JPH0641629Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Gases (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
JP1988151375U 1988-11-21 1988-11-21 除湿装置 Expired - Lifetime JPH0641629Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988151375U JPH0641629Y2 (ja) 1988-11-21 1988-11-21 除湿装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988151375U JPH0641629Y2 (ja) 1988-11-21 1988-11-21 除湿装置

Publications (2)

Publication Number Publication Date
JPH0270718U true JPH0270718U (en]) 1990-05-29
JPH0641629Y2 JPH0641629Y2 (ja) 1994-11-02

Family

ID=31425365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988151375U Expired - Lifetime JPH0641629Y2 (ja) 1988-11-21 1988-11-21 除湿装置

Country Status (1)

Country Link
JP (1) JPH0641629Y2 (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03110A (ja) * 1989-05-24 1991-01-07 Ube Ind Ltd 分離膜モジュール
JPH06134245A (ja) * 1992-10-20 1994-05-17 Orion Mach Co Ltd 膜式気体ドライヤ
JPH0754774A (ja) * 1993-08-09 1995-02-28 Fuji Sangyo Kk 空気圧縮装置
JP2010517748A (ja) * 2007-01-31 2010-05-27 フレアー・コーポレーション 気体膜分離装置の一体型掃気制御装置
JP2015531879A (ja) * 2012-09-18 2015-11-05 エーエスエムエル ネザーランズ ビー.ブイ. ステージシステム、ステージシステムを備えるリソグラフィ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6780817B2 (ja) * 2016-11-08 2020-11-04 Smc株式会社 除湿エレメント及びそれを有する除湿装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3735558A (en) * 1971-06-29 1973-05-29 Perma Pure Process Inc Process for separating fluids and apparatus
JPS502674A (en]) * 1973-04-30 1975-01-11
JPS59171729A (ja) * 1983-03-16 1984-09-28 Nissan Motor Co Ltd 自動車用サイドフイニツシヤ
JPS59171729U (ja) * 1983-04-26 1984-11-16 富士電機株式会社 半透膜除湿器
JPS61278306A (ja) * 1985-05-29 1986-12-09 ザ ダウ ケミカル カンパニ− 内側ラツプを有する改良された中空繊維膜装置
JPS6242723A (ja) * 1985-08-20 1987-02-24 Ube Ind Ltd 混合ガスの除湿方法
JPS63119834A (ja) * 1986-11-07 1988-05-24 Kuraray Co Ltd 空気除湿装置
JPS63248418A (ja) * 1987-04-02 1988-10-14 Ube Ind Ltd 混合気体の分離方法
JPS63258620A (ja) * 1987-04-17 1988-10-26 Ube Ind Ltd 混合ガス分離装置
JPH01236921A (ja) * 1988-03-15 1989-09-21 Ube Ind Ltd 気体の脱湿装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3735558A (en) * 1971-06-29 1973-05-29 Perma Pure Process Inc Process for separating fluids and apparatus
JPS502674A (en]) * 1973-04-30 1975-01-11
JPS59171729A (ja) * 1983-03-16 1984-09-28 Nissan Motor Co Ltd 自動車用サイドフイニツシヤ
JPS59171729U (ja) * 1983-04-26 1984-11-16 富士電機株式会社 半透膜除湿器
JPS61278306A (ja) * 1985-05-29 1986-12-09 ザ ダウ ケミカル カンパニ− 内側ラツプを有する改良された中空繊維膜装置
JPS6242723A (ja) * 1985-08-20 1987-02-24 Ube Ind Ltd 混合ガスの除湿方法
JPS63119834A (ja) * 1986-11-07 1988-05-24 Kuraray Co Ltd 空気除湿装置
JPS63248418A (ja) * 1987-04-02 1988-10-14 Ube Ind Ltd 混合気体の分離方法
JPS63258620A (ja) * 1987-04-17 1988-10-26 Ube Ind Ltd 混合ガス分離装置
JPH01236921A (ja) * 1988-03-15 1989-09-21 Ube Ind Ltd 気体の脱湿装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03110A (ja) * 1989-05-24 1991-01-07 Ube Ind Ltd 分離膜モジュール
JPH06134245A (ja) * 1992-10-20 1994-05-17 Orion Mach Co Ltd 膜式気体ドライヤ
JPH0754774A (ja) * 1993-08-09 1995-02-28 Fuji Sangyo Kk 空気圧縮装置
JP2010517748A (ja) * 2007-01-31 2010-05-27 フレアー・コーポレーション 気体膜分離装置の一体型掃気制御装置
JP2015531879A (ja) * 2012-09-18 2015-11-05 エーエスエムエル ネザーランズ ビー.ブイ. ステージシステム、ステージシステムを備えるリソグラフィ装置

Also Published As

Publication number Publication date
JPH0641629Y2 (ja) 1994-11-02

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